Thermal scanning probe lithography is a microfabrication technique that uses a heated probe to locally melt and reshape a substrate in order to create patterns or structures at the nanoscale. This technique is often used to fabricate microelectromechanical systems (MEMS), nanoelectromechanical systems (NEMS), and other nanoscale devices.

 

Research in this area typically focuses on improving the resolution, accuracy, and efficiency of the thermal scanning probe lithography process, as well as developing new applications for this technology in fields such as electronics, biotechnology, and materials science. Some potential topics for research in thermal scanning probe lithography include the development of new probe materials and geometries, the optimization of thermal and mechanical properties of the substrate, and the investigation of novel patterning strategies.